5/23/2011	6:33:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2011	6:33:17 PM	Recipe started at 6:33 PM
5/23/2011	6:33:17 PM	Helium valve closed
5/23/2011	6:33:17 PM	H2 valve closed
5/23/2011	6:33:17 PM	BCl3 valve closed
5/23/2011	6:33:17 PM	PH3 valve closed
5/23/2011	6:33:17 PM	SiCl4 pre valve closed
5/23/2011	6:33:17 PM	SiCl4 post valve closed
5/23/2011	6:33:17 PM	Main Vac valve closed
5/23/2011	6:33:17 PM	Bubbler valve closed
5/23/2011	6:33:17 PM	Bypass valve opened
5/23/2011	6:33:17 PM	Helium MFC set to  0.000000
5/23/2011	6:33:17 PM	H2 MFC set to  0.000000
5/23/2011	6:33:17 PM	BCl3 MFC set to  0.000000
5/23/2011	6:33:17 PM	PHl3 MFC set to  0.000000
5/23/2011	6:33:17 PM	SiCl4 MFC set to  0.000000
5/23/2011	6:33:17 PM	Bypass solenoid MFC set to  0.000000
5/23/2011	6:33:17 PM	Tube furnace set to 0
5/23/2011	6:33:17 PM	Helium valve closed
5/23/2011	6:33:17 PM	H2 valve closed
5/23/2011	6:33:17 PM	BCl3 valve closed
5/23/2011	6:33:17 PM	PH3 valve closed
5/23/2011	6:33:17 PM	SiCl4 pre valve closed
5/23/2011	6:33:17 PM	SiCl4 post valve closed
5/23/2011	6:33:17 PM	Bubbler valve closed
5/23/2011	6:33:17 PM	Main Vac valve opened
5/23/2011	6:33:17 PM	Bypass valve opened
5/23/2011	6:33:17 PM	Helium MFC set to  0.000000
5/23/2011	6:33:17 PM	H2 MFC set to  0.000000
5/23/2011	6:33:17 PM	BCl3 MFC set to  0.000000
5/23/2011	6:33:17 PM	PHl3 MFC set to  0.000000
5/23/2011	6:33:17 PM	SiCl4 MFC set to  0.000000
5/23/2011	6:33:17 PM	Bypass solenoid MFC set to  0.000000
5/23/2011	6:33:18 PM	Tube furnace set to 0
5/23/2011	6:33:18 PM	Run finished at 6:33 PM
5/23/2011	6:33:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
